日立無塵室運行指導標準

1.0目的Purpose

規(guī)范運行、操作程序，確保日立設施管理的流暢。

Standardized operation procedure to ensure smooth flow in facility operation management in HGSP.

2.0范圍Range

適用于日立龍崗工廠無塵室系統(tǒng)。

For HGSP Clean Room system.

3.0職責Duty

3.1??運行技術員：負責無塵室運行參數(shù)的監(jiān)控。

Operation technician: monitor operation parameters in Clean Room.

3.2??運行班長：帶領本班組技術員對日立龍崗工廠的設施運行進行監(jiān)控，發(fā)現(xiàn)問題、解決問題，并按照匯報程序及時向上級匯報。

Shift Leader: Lead technicians in monitoring HGSP facility operation, discover and solve issue, report to supervisor according to report procedure.

3.3??工程師：負責運行操作程序的編寫、更新、培訓，對運行操作提供技術支持，發(fā)現(xiàn)問題、分析問題、解決問題，并按照匯報程序及時向上級匯報；

Engineer: Write and update operation procedure. Train technicians, discover analyze and provide solution to the issues, report to supervisor according to reporting procedure.

4.0定義Definition

RAU?? Recycle Air Unit?循環(huán)空氣機

FFU?? Fan Filter Unit??風機過濾機

AHU?? Air Handling Unit空氣處理機

MAU?? Make up Air Unit?新風機

DCP? ?Dry Coil Pump三次泵

RAS?? Return Air System回風廊

5.0程序Procedure

5.1系統(tǒng)簡介：system brief introduction:

本系統(tǒng)包括3臺新晃新風處理機，設備安裝在A棟一層新風機房，3臺并列運行；82臺

RAU，設備安裝在A棟無塵室的回風廊處；4173臺FFU，設備安裝在潔凈的天花板上；1臺AHU設備安裝在干鞋區(qū)的天花板上；10臺傳遞窗，設備安裝在無塵室內(nèi)；26臺風淋室，2個風淋通道；6臺排風機，設備安裝在A棟一層新風機房。系統(tǒng)的作用:MAU將室外新風經(jīng)過濾，預熱，加濕，冷卻除濕，加壓，加熱及化學過濾處理后送入無塵室內(nèi)的高架地板下，F(xiàn)FU將回風廊處的風加壓，經(jīng)過高效過濾器過濾后送入無塵室內(nèi)，吹到高架地板下，和新風混合后被吸入RAU內(nèi)經(jīng)過表冷器處理。6臺排風機，將生產(chǎn)中產(chǎn)生的廢氣排到室外。AHU將為干鞋區(qū)提供熱風，將洗干凈的潔凈鞋吹干。風淋室和風淋通道在工作人員進入無塵室時吹凈工作人員身上的灰塵。

There are 3 MAUs running parallel in MAU Room of Building A. 82 RAUs been installed in RAS in the clean roomof Building A. 4173 FFUs been installed in the ceiling of Clean Room. 1 AHU been installed at the ceiling of Shoe Dryer Room. 10 pass windows been installed in Clean Room. 2 air-shower tunnels and 26 air shower pass boxes;6 EXF been installed in the RAU Room of Building A. The system function is as follows: ensure the makeup air is filtered,pre-heat, humidify, Cooling & dehumidify, pressurize, chemical filtered and heatedbefore delivering to Clean Room. FFU in the ceiling sends the air into clean room via HEPA filter, which is used under the raised floor mixed with the make up air, and then is drawn into RAU. After being cooled in the RAU, the make up air enters FFU that completes the whole cycle. 6 EXF machines will withdraw exhausted gas out of the clean room. Cleaned Clean Room shoes were dried by hot air from AHU in the Shoe Dryer Room. Air-shower tunnels and Air Shower pass box will removed the dust on staff as they are entering clean room.

系統(tǒng)建設商：日立建設

System contractor: HPC

系統(tǒng)要求：

System demand:

?5.2啟動前的檢查：

Before start check:

5.2.1?????檢查MAU盤柜上電壓是否正常，開關狀態(tài)；

Check MAU panel voltage, on-off state;

5.2.2???? ?檢查冷凍水水溫及水壓是否正常；

Check chilled water temperature and pressure

5.2.3?????檢查熱水水溫及水壓是否正常；

Check hot water temperature and pressure

5.2.4?????檢查RAU盤柜上的電壓是否正常；

Check RAU panel voltage

5.2.5?????檢查FFU控制盤柜上的電壓是否正常；

Check FFU control panel voltage

5.2.6?????檢查排風機控制盤柜上的電壓是否正常；

Check EXF control panel voltage

5.2.7?????檢查DCP盤柜上的電壓是否正常

Check DCP panel voltage

5.3啟動（遠程）：

Start(Remote):

5.3.1?????將MAU控制柜的轉(zhuǎn)換開關置于“遠程”；

Set MAU control panel switch in “Remote”

5.3.2?????在控制系統(tǒng)畫面上啟動MAU；

Start MAU in control system interface;

5.3.3?????在控制系統(tǒng)畫面上啟動DCP；

Start DCP in control system interface;

5.3.4?????現(xiàn)場啟動RAU的風機；

Local start RAU fans;

5.3.5?????現(xiàn)場啟動FFU的主電控制回路；

Local start FFU main electrical control circuit;

5.3.6?????設定好適當?shù)霓D(zhuǎn)速，在FFU控制畫面上點擊系統(tǒng)—全部—運行，啟動所有的FFU，

Set proper rotate speed, control the FFU by clicking the proper icon oninterface, start all FFU,

5.3.7?????在控制系統(tǒng)畫面上啟動排風機；

Start EXF from system control interface;

5.3.8?????觀察系統(tǒng)各項參數(shù)；

Monitor system parameters;

5.4停機（遠程）：

Stop (Remote)

5.4.1?????在控制系統(tǒng)上停止排風機；

Stop EXF from control system;

5.4.2?????在FFU控制系統(tǒng)上將所有的FFU停止

Stop all FFU on FFU control system

5.4.3?????現(xiàn)場關閉RAU風機；

Local close RAU;

5.4.4?????在控制系統(tǒng)上將DCP停止運行；

Stop DCP on control system;

5.4.5?????在控制系統(tǒng)上將MAU停止運行；

Stop MAU on control system;

5.4.6?????觀察系統(tǒng)狀態(tài)并做好相應該掛牌標識工作

Monitor system state and tag out.

?5.5故障緊急處理：

Emergency process:

5.5.1故障現(xiàn)象：

Failure phenomenon:

1.系統(tǒng)報警

System alarm

2．溫濕度，正壓指標超標；

Temperature, humidity and pressure over sepc.

3．系統(tǒng)斷電；

System power off

4．塵粒超標報警

Particle over spec.

（原文鏈接：http://www.gxshunjiang.com/a-775/）

5.5.2故障原因：

Failure cause:

1.顯示系統(tǒng)有故障或是有參數(shù)超標

Display system failure or parameter over spec.

2．系統(tǒng)存在不完善,控制精度達不到；

System faultiness, short of precision

3．緊急停電；

Urgency power off;

4．系統(tǒng)臟或是系統(tǒng)密封不良

System cleanliness or improper air seal.

5.5.3匯報流程

Monitoring process

1．如果無塵室室的溫度低于21度或是高于25度，需加強監(jiān)控并及時向系統(tǒng)工程部匯報并通知生產(chǎn)部。

If temperature in Clean Room over sepc.(21?C ~ 25?C), technician on duty must strengthen monitor and report to both Eng Dept. and MFG.

2．如果無塵室的濕度低于40%或是高于60%，需加強監(jiān)控并及時向系統(tǒng)工程師匯報并通知生產(chǎn)部。

If humidity in Clean Room over 60% or below 40% spec. technician on duty must strengthen monitor and report to both project engineer. and MFG.

3．如果無塵室室的正壓低于12Pa，及時向系統(tǒng)工程匯報并通知生產(chǎn)部。

If pressure in Clean Room blew 12Pa, technician on duty must strengthen monitor and report to both Eng Dept. and MFG.

5.5.4處理措施：

Corrections:

1.?手動復位報警信號，如果信號復位還是報故障則向項目工程師或是領導報告。

Handle reset alarm signal, if there is still in failure, technician on duty must report to project engineer or leader.

2.?確認系統(tǒng)溫濕度，正壓超標點，如果溫度偏低（低于21度）將此溫度探頭控制點的溫度設定點改高0.5度，如果溫度偏高（高于25度）將此溫度探頭控制點的溫度設定點改低0.5度，如果無塵室內(nèi)的某個探頭濕度高（高于60%）則檢查此區(qū)的地面是否有大量的水份，如有請及時進行清除處理，如果沒有則檢查MAU的除濕段是否工作正常。如果無塵室內(nèi)的某個探頭濕度低（低于40%）則檢查MAU的預熱段和加濕段是否工作正常，如有異常請排除故障。如果正壓低于12Pa，立即檢查相應該區(qū)域的門是否有未關閉的門或存在嚴重的泄露，如果有請做好相應的關閉處理，如果沒有，請將正壓控制點的設定值增大2Pa,直到正壓滿足要求，如果修改后，系統(tǒng)指標還是超標立刻通知工程部按P-PCE-COM-004文件執(zhí)行。

Ensure system temperature, humidity and pressure control sepc. If temperature below 21oC, then set the sensor control point up 0.5oC; If temperature over 25oC, then set the sensor control point down 0.5oC. If any sensor humidity over 60%, check whether there is leaking water on the floor or not? If yes then clean it at once, if No then check MAU dehumidifier. If any sensor humidity below 40%,then check MAU pre-heat and humidifying, if there is any failure ,take action at once.

If pressure below 12Pa, check whether the door properly closed or any leaking? If yes, take action at once; if No, then set the sensor control point up 2 Pa, until meet the demand. If actions above fail, report to MFG follow up P-PCE-COM-004.

3.?確認系統(tǒng)緊急停電，在上位機上進行故障復位，并按開機順序重新開啟系統(tǒng)，開機過程如果系統(tǒng)的濕度過大或過低，可手動調(diào)節(jié)除濕閥的開度，以保證無塵室在盡可能短的時間內(nèi)將參數(shù)恢復正常。

Ensure system urgency power off, reset in control PC, and restart system sequentially. If humidity over spec. during the process, adjust dehumidify valve opening, So that the parameter in Clean Room could return to normal as soon as possible.

4.?如果接到塵粒報警信號，則立即配合工程部的人員檢查相應區(qū)域的的FFU的風速和高效過濾器的過濾效果，并檢查相應該區(qū)域的盲板是否存在泄漏。如果風速不達標則調(diào)此臺FFU的轉(zhuǎn)速，如果高效過濾器的過濾效果不佳，則更換高效過濾器。如果盲板存在泄漏則重新固定盲板。參見工程部文件S-PCE-COM-030執(zhí)行。

If receive particle over spec. signal, inform and assist Eng Dept. with checking FFU wind speed and HEPA filter, whether there are blind boards leaking. If wind speed is not up to the mark, adjust rotate speed of FFU at once. If HEPA filter fails to function replace it. If blind boards leaking, then re-fix them. Refer to the document of S-PCE-COM-030.

5.?檢查報警區(qū)域的設備和環(huán)境清潔狀況，如果存在臟物則通知工程部清潔處理。

Check alarm area equipment and environment cleaning state, if dirty, then report Eng Dept. to take actions.

5.6預防性維護：

Preventive Maintenance:

5.6.1月度維護：

Monthly Maintenance

1．檢查MAU的初中效過濾器，當壓差報警時對初效過濾器進行清潔或更換；

Check MAU filter, clean or replace it when DP alarms.

2．檢查DCP水泵的運行狀況；

Check DCP pump running state;

3．檢查風淋室的初效過濾器；初效堵時對初效過濾器進行清潔或更換；

Check Air Shower RoomPre-filter; clean or replace it when blocked.

4．檢查FFU的運行狀況；

Check FFU running state.

5.檢查RAU的運行狀況；當表冷器臟時清潔表冷器

Check RAU running state; clean cooling coil if it is dirty.

5.6.2季度維護：

Quarterly Maintenance:

1．月度維護內(nèi)容；

Monthly Maintenance contents;

2．檢查電機外表面；

Check surface of motor;

3．檢查并清理MAU的濕膜加濕器；

Check and clean MAU humidifier.

4．檢查MAU中效過濾器，當壓差報警時更換中效；

Check MAU MEHA filter, replace it when DP alarm;

5．檢查排風機電機外表面；

Check surface of EXF motor;

6．檢查MAU的高效；當其失效時更換高效；

Check HEPA filter in MAU, replace it when in failure.

7．潤滑RAU及風淋室風機軸承；

Lubricate RAU and Air Shower Room EXF bearing.

5.6.3??年度維護：

Yearly Maintenance:

1．季度維護內(nèi)容；

Quarterly Maintenance contents;

2．檢查MAU風機扇葉是否動平衡，馬達基座是否緊固；

Check MAU fan blades whether dynamic balance or not, base of motor whether tighten or not.

3．檢查DCP馬達基座是否緊固；

Check whether base of DCP motor tighten or not.

4．檢查排風機扇葉是否動平衡，馬達基座是否緊固；

Check EXF blades whether dynamic balance or not, base of motor whether tighten or not;

5．檢查AHU風機馬達基座是否緊固；

Check base of AHU fans motor whether tighten or not;

6．檢查MAU風機電機，DCP電機，排風機電機，RAU風機電機，

AHU風機電機絕緣；

Check MAU motor, DCP motor, EXF motor, RAU motor, AHU motor insulation.

7．風淋室風機電機基座是否緊固，電機絕緣；

Check base of motor in Air Shower Room whether tighten or not, motor insulation.

5.6.4?要求：

Demand:

1．在無塵室內(nèi)做維護保養(yǎng)時，維修人員要遵守無塵室管理規(guī)定，穿好凈化服，并對維修工具進行有效的清潔；具體參見文件P-PCE-COM-059

Technician on duty must obey the rule, take cleaning cloth and clean maintenance tools when doing maintenance in Clean Room. Refer toP-PCE-COM-059

5.7操作程序流程圖：

Operation flowchart: Pls find attachment.

6.0相關資料：

Relative Data:

6.1無塵室控制系統(tǒng)說明書；

Clean Room system user manual

6.2 FFU控制系統(tǒng)說明書；

FFU systemuser manual

6.3系統(tǒng)圖紙及設備說明書

System drawing and equipment user manual

7.0記錄：

Records:

7.1? ?Clean Room Process Report；

7.2??干盤管水溫水壓表；

Dry coil water temperature and pressure

7.3??無塵室P配電柜抄表；P electrical panel in clean room

7.4??無塵室S配電柜抄表；S electrical panel in clean room

7.5??無塵室系統(tǒng)參數(shù)超標統(tǒng)計表；Sensors parameters over spec record